The M-VP-5ZA vertical stage is an ultra-low profile, precision vertical stage with minimum incremental motion capability of 60 nm, high-responsiveness and perfectly straight trajectory over 4.8 mm travel. Features include: an innovative inclined-plane design; a cool running, high torque DC motor with a precision preloaded, long-life, ball screw ensuring high speed motion with minimum settling time; a high-resolution linear scale directly attached to the moving rail, eliminating all drive-train induced motion errors; and two pairs of vertically mounted double-row linear ball bearing slides resulting in pure vertical motion. A standard 3-point mounting interface for a wafer chuck is provided as well. Manual vertical adjustments can be made using a flat screw driver for convenience. Typical applications include: semiconductor wafer inspection, photonics test and packaging, micro-assembly, precision metrology, and surface inspection systems. The VP-5ZA is compatible with the VP-25X linear stages and other Newport positioning products. For mounting to optical tables or to the ILS linear stages, use the optional base plate VP-BP.

• 行程范围

  4.8 mm

• 最小位移增量

  0.060 µm

• 最大速度

  5 mm/s

• 中心负载

  50 N

• Accuracy, Typical

  ±0.6 µm

• Accuracy, Guaranteed

  ±1.5 µm

• 双向重复精度，典型值

  ±0.10 µm

• 双向重复精度，保证值

  ±0.25 µm

• 单向重复精度，典型值

  ±0.06 µm

• 单向重复精度，保证值

  ±0.15 µm

• 驱动螺距

  1 mm

• Encoder Resolution

  0.0196 µm

• 限位开关

  Optical

• 原点

  Optical, centered

• 原点重复精度

  ±0.1 µm

• 电缆长度

  1.5 m  

• 接头

  DB25 Male

• 俯仰，典型值

  ±30 µrad

• Pitch, Guaranteed

  ±50 µrad

• 俯仰顺应性

  45 µrad/Nm  

• Roll, Typical

  ±30 µrad

• Roll, Guaranteed

  ±50 µrad

• 翻转顺应性

  50 µrad/Nm  

• 偏转，典型值

  ±30 µrad

• Yaw, Guaranteed

  ±50 µrad

• 偏摆顺应性

  10 µrad/Nm  

• 螺纹类型

  M3 and M4

• 重量

  2.4 kg  

• MTBF

  20,000 h (25% load, 10% duty cycle)

• RoHS

  Compliant

M-VP-5ZA垂直级是一种超低轮廓、高精度垂直级，最小增量运动能力为60nm，高响应性，运行4.8 mm以上的完美直线轨迹。特点包括:创新的斜面设计;采用精密预紧、寿命长、滚珠丝杠，保证高速运动，沉降时间最短;一个高分辨率的线性比例直接连接到移动的轨道，消除了所有驱动列车诱导的运动误差;和两对垂直安装的双列直线滚珠轴承滑道，导致纯垂直运动。还提供了晶片夹头的标准三点安装接口。手动垂直调整可以使用平螺丝刀方便。典型应用包括:半导体晶片检测、光子学测试和封装、微组装、精密计量和表面检测系统。该VP-5ZA兼容VP-25X线性级和其他新港定位产品。若要安装到光学表或盲降线性级，请使用可选的底板VP-BP。