The XMS100V stage is comprised of a standard XMS100 stage mounted on a high flatness (surface flatness within 5 µm) vertical plate and a low friction air cylinder connected to the carriage. The custom-designed connection of the air cylinder to the carriage eliminates the effect of the air cylinder’s motion on the performance of the XMS100 stage. With the proper adjustment of pressure, a perfect balance of the load can be achieved. When motor power is turned off, the air cylinder’s valve will enable a controlled descent of the carriage. Also available with a more compact, but load-specific, magnetic counterweight. 

• 行程范围

  100 mm  

• 最小位移增量

  0.05 µm

• 最大速度

  300 mm/s

• 中心负载

  100 N

• Accuracy, Guaranteed

  ± 0.75 µm

• 双向重复精度，保证值

  ± 0.05 µm

• 限位开关

  Optical, fiducial on encoder

• 原点

  Optical, at center of travel, including mechanical zero signal

• 电缆长度

  5 m  

• 俯仰顺应性

  2.5 µrad/Nm  

• 翻转顺应性

  2.0 µrad/Nm  

• 偏摆顺应性

  3.5 µrad/Nm

• 直线度，平面度

  ± 0.75 µm

• 重量

  3.5 kg

• MTBF

  20,000 h

XMS100V阶段由标准XMS100阶段安装在高平面度(内表面平面度5µm)竖直板和低摩擦气缸连接到马车。气缸与车厢的定制连接消除了气缸运动对XMS100级性能的影响。通过适当的压力调节，可以达到负载的完美平衡。当发动机电源关闭时，气缸的阀门将使起落架能够控制下降。也可与更紧凑，但负载特定，磁性平衡重量。