The ONE-XY300HA is a high accuracy version of an integrated XY linear motor stage designed to eliminate the integration of individual X and Y stages and increase system stiffness for dynamic applications. It features a travel range of 290 mm, with precise orthogonality alignment between the X and Y axes. This stage utilizes robust components such as its iron-less motor drive and cross-roller bearings to deliver high performance, making them ideal solutions for precision industrial applications such as semiconductor wafer inspection, microelectronics test and assembly, metrology, laser microprocessing.

• 电动轴

  XY

• 行程范围

  300 mm

• 最大速度

  200 mm/s

• 最小位移增量

  0.050 µm

• 最大加速度

  0.2 G

• Continuous Motor Force

  53 N

• Peak Motor Force

  107 N

• 中心负载

  350 N

• Accuracy, Guaranteed

  ±0.5 µm

• 双向重复精度，保证值

  ±0.100 µm

• 典型平面度

  ±3.0 µm

• Straightness, Typical

  ±3.0 µm

• Pitch, Guaranteed

  ±90 µrad

• Yaw, Guaranteed

  ±90 µrad

• Roll, Typical

  ±24 µrad

• 正交性

  5 µrad

• Encoder Resolution

  1 Vpp 20 µm pitch

• 原点

  Optical, centered

• 原点重复精度

  ±0.1 µm

• 电缆长度

  3 m

• 接头类型

  DB15 Male and DB9 Male

• 宽度

  500 mm

• 重量

  75 kg

• MTBF

  20,000 h (25% load, 30% duty cycle)

• RoHS

  Compliant

1 - xy300ha是集成XY直线电机级的高精度版本，设计用于消除单个X和Y级的集成，增加系统的刚度，用于动态应用。它具有290毫米的行程范围，X轴和Y轴之间具有精确的正交对准。这一阶段采用了稳健的元件，如无铁电机驱动和十字滚子轴承，以提供高性能，使他们理想的解决方案精密工业应用，如半导体晶圆检验，微电子测试和组装，计量，激光微加工。