The ONE-XY100HA is a high accuracy version of an integrated XY linear motor stage designed to eliminate the integration of individual X and Y stages and increase system stiffness for dynamic applications. It features a travel range of 90 mm, with precise orthogonality alignment between the X and Y axes. This stage utilizes robust components such as its iron-less motor drive and cross-roller bearings to deliver high performance, making them ideal solutions for precision industrial applications such as semiconductor wafer inspection, microelectronics test and assembly, metrology, laser microprocessing.

• 动轴

  XY

• 行程范围

  90 mm

• 最大速度

  200 mm/s

• 最小位移增量

  0.050 µm

• 最大加速度

  0.3 G

• Continuous Motor Force

  10 N

• Peak Motor Force

  21 N

• 中心负载

  120 N

• Accuracy, Guaranteed

  ±0.3 µm

• 双向重复精度，典型值

  ±0.040 µm

• 双向重复精度，保证值

  ±0.080 µm

• 典型平面度

  ±1.0 µm

• Straightness, Typical

  ±1.0 µm

• Pitch, Guaranteed

  ±65 µrad

• Yaw, Guaranteed

  ±65 µrad

• 典型滚动（保证值）

  ±29 (na) µrad

• 正交性

  5 µrad

• Encoder Resolution

  1 Vpp 20 µm pitch

• 原点

  Optical, centered

• 原点重复精度

  ±0.1 µm

• 电缆长度

  3 m

• 接头类型

  DB15 Male and DB9 Male

• 宽度

  184 mm

• 重量

  5.8 kg

• MTBF

  20,000 h (25% load, 30% duty cycle)

• RoHS

  Compliant

ONE-XY100HA是XY直线电机集成级的高精度版本，旨在消除单个X和Y级的集成，提高系统的动态应用刚度。它的特点是行程范围为90mm，在X轴和Y轴之间有精确的正交对齐。这一阶段采用了稳健的元件，如无铁电机驱动和十字滚子轴承，以提供高性能，使他们理想的解决方案精密工业应用，如半导体晶圆检验，微电子测试和组装，计量，激光微加工。