The M-IMS600CCHA Linear Stage with DC Motor uses the same industry-proven technology as the ILS Series. The stage features a robust design and high performance at low cost, making it a cost-effective solution for precision industrial and laboratory applications. Features include: recirculating ball bearing slides to provide excellent payload capabilities and long life; FEM-optimized extruded aluminum body to avoid bending effects or deflection under load. The preloaded, backlash-free ballscrew provides rapid motion with fast, step and settling times. Position is read with a 4000 pts/rev. encoder mounted directly on the screw. An integral linear scale provides 0.1 μm resolution feedback, improving precision. This stage is ideal for many precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, pick and place, DNA sequencing or laser machining.

• 行程范围

  600 mm

• 最大速度

  200 mm/s

• 最小位移增量

  0.20 µm

• 中心负载

  600 N

• 轴向负载 (-Cx, +Cx)

  30 N

• 逆轴向负载 (-Cx)

  -30 N

• Accuracy, Typical

  ±3.5 µm

• Accuracy, Guaranteed

  ±6.5 µm

• 单向重复精度，典型值

  ±0.12 µm

• 单向重复精度，保证值

  ±0.25 µm

• 双向重复精度，典型值

  ±0.20 µm

• 双向重复精度，保证值

  ±0.5 µm

• 俯仰顺应性

  0.2 µrad/Nm  

• 偏摆顺应性

  1 µrad/Nm  

• 翻转顺应性

  1 µrad/Nm  

• 驱动螺距

  5 mm  

• Encoder Resolution

  0.1 µm

• 限位开关

  Optical

• 原点

  Optical, close to lower limit

• 原点重复精度

  ±0.1 µm

• 电缆长度

  5 m  

• 接头类型

  DB25 Male

• 螺纹类型

  M6

• 重量

  22 kg  

• MTBF

  20,000 h (25% load, 30% duty cycle)

• RoHS

  Compliant

M-IMS600CCHA直流电动机线性级采用与盲降系列相同的工业验证技术。该阶段的特点是稳健的设计和高性能，以低成本，使其成为一个成本效益的解决方案的精密工业和实验室应用。特点包括:滚珠轴承滑块再循环，载荷能力强，使用寿命长;飞秒优化挤压铝阀体，以避免弯曲影响或挠度下的负载。预加载，无后摆的滚珠丝杆提供快速运动，快速，步骤和沉降时间。位置读数为4000点/转速。编码器直接安装在螺丝上。积分线性尺度提供了0.1μm决议反馈,提高精度。这一阶段适用于半导体晶圆检验、微电子测试与组装、拣选与放置、DNA测序或激光加工等许多精密工业应用。