The M-IMS600CC Linear Stage with DC Motor uses the same industry-proven technology as the ILS Series. The stage features a robust design and high performance at low cost, making it a cost-effective solution for precision industrial and laboratory applications. Features include: recirculating ball bearing slides to provide excellent payload capabilities and long life; FEM-optimized extruded aluminum body to avoid bending effects or deflection under load. The preloaded, backlash-free ballscrew provides rapid motion with fast, step and settling times. Position is read with a 4000 pts/rev. encoder mounted directly on the screw. This stage is ideal for many precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, pick and place, DNA sequencing or laser machining.

• 行程范围

  600 mm

• 最大速度

  200 mm/s

• 最小位移增量

  1.25 µm

• 中心负载

  600 N

• 轴向负载 (-Cx, +Cx)

  30 N

• 逆轴向负载 (-Cx)

  -30 N

• Accuracy, Typical

  ±4.0 µm

• Accuracy, Guaranteed

  ±9.0 µm

• 单向重复精度，典型值

  ±0.50 µm

• 单向重复精度，保证值

  ±0.65 µm

• 双向重复精度，典型值

  ±0.75 µm

• 双向重复精度，保证值

  ±1.25 µm

• 俯仰，典型值

  ±50 µrad

• Pitch, Guaranteed

  ±125 µrad

• 俯仰顺应性

  0.2 µrad/Nm  

• 偏转，典型值

  ±30 µrad

• Yaw, Guaranteed

  ±75 µrad

• 偏摆顺应性

  1 µrad/Nm  

• 翻转顺应性

  1 µrad/Nm  

• 驱动螺距

  5 mm  

• Encoder Resolution

  1.25 µm

• 限位开关

  Optical

• 原点

  Optical, close to lower limit

• 原点重复精度

  ±0.5 µm

• 电缆长度

  5 m  

• 接头类型

  DB25M

• 螺纹类型

  M6

• 重量

  22 kg  

• MTBF

  20,000 h (25% load, 30% duty cycle)

• RoHS

  Compliant

M-IMS600CC直流电动机线性级采用与盲降系列相同的工业验证技术。该阶段的特点是稳健的设计和高性能，以低成本，使其成为一个成本效益的解决方案的精密工业和实验室应用。特点包括:滚珠轴承滑块再循环，载荷能力强，使用寿命长;飞秒优化挤压铝阀体，以避免弯曲影响或挠度下的负载。预加载，无后摆的滚珠丝杆提供快速运动，快速，步骤和沉降时间。位置读数为4000点/转速。编码器直接安装在螺丝上。这一阶段适用于半导体晶圆检验、微电子测试与组装、拣选与放置、DNA测序或激光加工等许多精密工业应用。