The M-IMS600LM Linear Stage is designed for self-supporting applications with a 600 mm travel range. The extreme stiffness of the FEM-optimized aluminum body allows mounting on 4-pts, without degrading its performance making it ideal for delay lines and other applications on non-flat mounting surfaces. The linear motor employs a centered, high efficiency 3-phase synchronous iron core, linear motor as driving element, providing high speed, high acceleration and high system responsiveness. The IMS series stages are ideal for many precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, DNA sequencing or laser machining.

• 行程范围

  600 mm

• 最大速度

  1000 mm/s

• 最小位移增量

  0.020 µm

• Continuous Motor Force

  100 N

• Peak Motor Force

  210 N

• 中心负载

  600 N

• Accuracy, Typical

  ±3.0 µm

• Accuracy, Guaranteed

  ±7.5 µm

• 双向重复精度，典型值

  ±0.09 µm

• 双向重复精度，保证值

  ±0.25 µm

• 俯仰，典型值

  ±50 µrad

• Pitch, Guaranteed

  ±125 µrad

• 俯仰顺应性

  0.2 µrad/Nm

• 偏转，典型值

  ±30 µrad

• Yaw, Guaranteed

  ±75 µrad

• 偏摆顺应性

  1 µrad/Nm

• 翻转顺应性

  1 µrad/Nm

• Encoder Resolution

  1 Vpp 20 µm pitch

• 限位开关

  Optical

• 原点

  Optical, centered

• 原点重复精度

  ±0.05 µm

• 电缆长度

  5 m

• 接头类型

  DB9 Male, DB9 Female, and DB15

• 螺纹类型

  M6

• 重量

  23 kg

• MTBF

  20,000 h (25% load, 30% duty cycle)

• RoHS

  Compliant

M-IMS600LM线性级是为具有600mm行程范围的自支撑应用而设计的。经有限元优化的铝阀体具有极高的刚度，可以安装在4点上，同时不会降低性能，因此非常适合延迟线和其他非平面安装表面的应用。直线电机采用集中、高效的三相同步铁芯，直线电机作为驱动元件，具有高速、高加速度和高系统响应性。IMS系列产品适用于半导体晶圆检测、微电子测试与组装、DNA测序或激光加工等精密工业应用。