The M-IMS1000LM Linear Stage is designed for self-supporting applications with a 1000 mm travel range. The stage features a robust design and high performance at low cost, making it a cost-effective solution for precision industrial and laboratory applications. The IMS utilizes an FEM-optimized extruded aluminum body to avoid bending effects or deflection under load. The linear motor employs a centered, high efficiency 3-phase synchronous iron core, linear motor as driving element, providing high speed, high acceleration and high system responsiveness. The IMS series stages are ideal for many precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, DNA sequencing or laser machining.

• 行程范围

  1000 mm

• 最大速度

  1000 mm/s

• 最小位移增量

  0.020 µm

• Continuous Motor Force

  100 N

• Peak Motor Force

  210 N

• 中心负载

  600 N

• Accuracy, Typical

  ±4.0 µm

• Accuracy, Guaranteed

  ±9.0 µm

• 双向重复精度，典型值

  ±0.12 µm

• 双向重复精度，保证值

  ±0.50 µm

• 俯仰，典型值

  ±112 µrad

• Pitch, Guaranteed

  ±225 µrad

• 俯仰顺应性

  0.2 µrad/Nm

• 偏转，典型值

  ±40 µrad

• Yaw, Guaranteed

  ±150 µrad

• 偏摆顺应性

  1 µrad/Nm

• 翻转顺应性

  1 µrad/Nm

• Encoder Resolution

  1 Vpp 20 µm pitch

• 限位开关

  Optical

• 原点

  Optical, centered

• 原点重复精度

  ±0.05 µm

• 电缆长度

  5 m

• 接头类型

  DB9 Male, DB9 Female, and DB15

• 螺纹类型

  M6

• 重量

  28 kg

• MTBF

  20,000 h (25% load, 30% duty cycle)

• RoHS

  Compliant

M-IMS1000LM线性级是为具有1000mm行程范围的自支撑应用而设计的。该阶段的特点是稳健的设计和高性能，以低成本，使其成为一个成本效益的解决方案的精密工业和实验室应用。IMS采用了经有限元优化的挤压铝型材，以避免在负载下的弯曲效应或挠度。直线电机采用集中、高效的三相同步铁芯，直线电机作为驱动元件，具有高速、高加速度和高系统响应性。IMS系列产品适用于半导体晶圆检测、微电子测试与组装、DNA测序或激光加工等精密工业应用。