The FMS100PPHA precision linear stage is capable of 100mm of travel and comes equipped with a stepper motor and a linear encoder. Featuring monolithic steel construction, patent-pending preload technology, and innovative anti-creep cross-roller bearings, this stage is capable of smooth motion with exceptional flatness and straightness. Steel construction and thermally-matched design insure optimal repeatability and stability. Typical applications include: contact and non-contact profilometry, mechanical and tribological testing, microstructure characterization and laser micromachining.

• 行程范围

  100 mm

• 最大速度

  50 mm/s

• 最小位移增量

  0.10 µm

• 中心负载

  150 N

• 轴向负载 (-Cx, +Cx)

  30 N

• 逆轴向负载 (-Cx)

  -30 N

• Accuracy, Typical

  ±0.2 µm

• Accuracy, Guaranteed

  ±0.5 µm

• 单向重复精度，典型值

  ±0.06 µm

• 单向重复精度，保证值

  ±0.10 µm

• 双向重复精度，典型值

  ±0.15 µm

• 双向重复精度，保证值

  ±0.25 µm

• 典型平面度（保证值）

  ±0.25 (±0.75) µm

• 典型直线度（保证值）

  ±0.25 (±0.75) µm

• 俯仰，典型值

  ±15 µrad

• Pitch, Guaranteed

  ±40 µrad

• 俯仰顺应性

  2 µrad/Nm  

• 偏转，典型值

  ±4.0 µrad

• Yaw, Guaranteed

  ±10 µrad

• 偏摆顺应性

  2 µrad/Nm  

• 翻转顺应性

  3 µrad/Nm  

• 驱动螺距

  2 mm  

• Encoder Resolution

  0.05 µm

• 限位开关

  Optical

• 原点

  Optical, close to lower limit

• 原点重复精度

  ±0.05 µm

• 电缆长度

  3 m  

• 接头类型

  DB25 Male

• 螺纹类型

  M6

• 重量

  6.5 kg  

• MTBF

  20,000 h (25% load, 30% duty cycle)

• RoHS

  Compliant

FMS100PPHA精密线性级可行走100mm，配有步进电机和线性编码器。本阶段采用整体钢结构，预装专利技术，采用创新的抗蠕变十字滚子轴承，运动平稳，平直度特别好。钢结构和热匹配设计确保了最佳的重复性和稳定性。典型应用包括:接触和非接触轮廓测量、机械和摩擦学测试、微观结构表征和激光微加工。