The GTS70 high-precision linear stage is engineered to provide outstanding trajectory accuracy in a compact, robust, and cost effective package with 100 nm Minimum Incremental Motion. Featuring anti-creep crossed roller bearings via geared retainers, a high-torque DC motor, and a low friction ball screw, GTS70 is capable of precise, ripple-free motion with no cage migration. Advanced asymmetric body design with an engineered flexible preload is insensitive to non-ideal mounting surfaces and it provides consistent results over varying temperatures. The extra thin and compliant carriage has been optimized for different load conditions including XY configurations and high vertical load capacity, providing excellent bi-directional repeatability of ± 0.1 μm. Typical applications include surface scanning, test and calibration, optical component alignment and attachment, and high-precision optical delay lines.
行程范围
70 mm
最大速度
50 mm/s
最小位移增量
0.10 µm
中心负载
100 N
轴向负载 (-Cx, +Cx)
25 N
逆轴向负载 (-Cx)
-25 N
Accuracy, Typical
±0.30 µm
Accuracy, Guaranteed
±1.0 µm
双向重复精度,典型值
±0.06 µm
双向重复精度,保证值
±0.10 µm
典型平面度(保证值)
±0.25 (±0.50) µm
典型直线度(保证值)
±0.25 (±0.50) µm
俯仰,典型值
±15 µrad
Pitch, Guaranteed
±30 µrad
俯仰顺应性
10 µrad/Nm
偏转,典型值
±15 µrad
Yaw, Guaranteed
±30 µrad
偏摆顺应性
10 µrad/Nm
翻转顺应性
10 µrad/Nm
驱动螺距
2 mm
Encoder Resolution
0.050 µm
限位开关
Optical
原点
Optical, centered
原点重复精度
±0.05 µm
电缆长度
3 m
接头类型
DB25 Male
螺纹类型
M4 and M6
重量
2.7 kg
MTBF
20,000 h (25% load, 30% duty cycle)
RoHS
Compliant
GTS70高精度线性级被设计为提供卓越的弹道精度在一个紧凑,鲁棒,和成本效益的包与100纳米最小增量运动。GTS70采用齿轮保持架防蠕变交叉滚子轴承,高转矩直流电机,低摩擦滚珠丝杠,具有精确无撕裂运动,不移动笼架的特点。先进的非对称车身设计与工程柔性预紧力是不敏感的非理想的安装表面,它提供了一致的结果在不同的温度。额外的薄和兼容的马车已经优化了不同负载条件下包括XY配置和高垂直负载能力,提供优秀的双向可重复性μm±0.1。典型应用包括表面扫描、测试和校准、光学元件校准和附件以及高精度光学延迟线。