The M-ILS100LM Linear Motor Stage feature a robust design with 100 mm of high performance travel and low cost design, making it a cost-effective solutions for precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, pick and place, DNA sequencing, or laser machining. It utilizes an FEM-optimized extruded aluminum body that is extremely stiff and minimizes the bending effect caused by the different thermal expansion coefficients of the aluminum body and the steel rails. The rigidity of the body minimizes the deflection under load. The ILS-LM employs a centered, high efficiency 3-phase, synchronous ironless, linear motor that is absolutely noise-free and has the advantage of higher speed, high acceleration and high system responsiveness without wear associated with motor brushes or drive screws. Recirculating ball bearing slides provide excellent payload capabilities and long life. The movement is smooth with low noise. Precision position feedback is supplied by a very repeatable linear scale mounted in the stage. The encoder signals are interpolated by Newport’s XPS motion controller with nanometer resolution for outstanding position sensitivity, repeatability, and stability.


M-ILS100LM直线电机级具有100 mm高性能行程和低成本设计的鲁棒性设计，是半导体晶片检测、微电子测试与组装、拣选与放置、DNA测序或激光加工等精密工业应用的性价比高的解决方案。它利用了一个飞秒优化的挤压铝车身，它是极其僵硬的，并最小化了由铝车身和钢轨的不同热膨胀系数引起的弯曲效应。阀体的刚性使负载下的挠度降至最低。ILS-LM采用了一个集中的、高效的三相、同步无铁的直线电机，绝对无噪音，具有高速、高加速度和高系统响应性的优点，无需使用电机刷或驱动螺丝。滚珠轴承滑块具有良好的载荷能力和较长的使用寿命。运动平稳，噪音低。精密位置反馈是由安装在舞台上的一个非常可重复的线性刻度提供的。编码器的信号插值由新港的XPS运动控制器与纳米分辨率为突出的位置灵敏度，重复性和稳定性。