The M-ILS200HA High Accuracy DC Servo Linear Stage offers a 100 mm travel range and combines fast, sub-micron resolution motion in a highly stiff and robust package. Its extruded aluminum body with Metric threaded holes has been optimized to avoid bending effects caused by the different thermal expansion coefficients of the aluminum body and steel rails. The special U-profile also provides stiffness to the structure while keeping the mass low. A preloaded, backlash-free ballscrew provides rapid movements with fast step and settling times. The screw is accurately profiled to reduce heating to a minimum and extend the life of the stage. Recirculating ball bearing slides ensure accurate linear motion and eliminate ball cage migration found on typical linear ball bearings or crossed roller bearings. The M-ILS200HA features an integrated linear scale providing 0.1 μm resolution feedback. An upper rigid cover prevents damage to the drive train and protects it from dust, debris and other pollutants. ILS Series stages also feature an origin located at the center of travel for repeatable initialization, limit switches to prevent over travel, and elastomeric end-of-run dampers for smooth emergency braking.
行程范围
200 mm
最大速度
100 mm/s
最小位移增量
0.30 µm
中心负载
250 N
轴向负载 (-Cx, +Cx)
40 N
逆轴向负载 (-Cx)
-40 N
Accuracy, Typical
±0.8 µm
Accuracy, Guaranteed
±3.0 µm
单向重复精度,典型值
±0.08 µm
单向重复精度,保证值
±0.20 µm
双向重复精度,典型值
±0.15 µm
双向重复精度,保证值
±0.35 µm
俯仰,典型值
±35 µrad
Pitch, Guaranteed
±100 µrad
俯仰顺应性
10 µrad/Nm
偏转,典型值
±25 µrad
Yaw, Guaranteed
±80 µrad
偏摆顺应性
10 µrad/Nm
翻转顺应性
15 µrad/Nm
驱动螺距
2 mm
Encoder Resolution
0.1 µm
限位开关
Optical
原点
Optical, centered
原点重复精度
±0.1 µm
电缆长度
3 m
接头类型
DB25 Male
螺纹类型
M6
重量
5.1 kg
MTBF
20,000 h (25% load, 30% duty cycle)
RoHS
Compliant
M-ILS200HA高精度直流伺服线性级提供了100毫米的行程范围,并结合了快速,亚微米分辨率的运动在一个高度刚性和健壮的包。优化了米制螺纹孔挤压铝型材,避免了铝型材与钢轨热膨胀系数不同造成的弯曲效应。特殊的u型型材还提供了刚度的结构,同时保持低质量。预加载,无后摆滚珠丝杆提供快速的运动,快速的步骤和沉淀时间。螺杆外形精确,将加热降至最低限度,延长舞台寿命。滚珠轴承滑块可保证精确的直线运动,消除典型的直线滚珠轴承或交叉滚子轴承上的球笼移动。M-ILS200HA特性集成线性尺度提供0.1μm决议反馈。上刚性盖防止损坏驱动列车,并保护它免受灰尘,碎片和其他污染物。盲降系列还具有位于行程中心的原点,用于可重复初始化,限位开关用于防止过度行程,弹性末端阻尼器用于平稳紧急制动。