The XMS100 Ultra-Performance Linear Stage delivers world-leading dynamic performance capable of consistent, reliable motion to 1 nm with a travel range of 100 mm. Innovative and compact; XM stages provide robust, repeatable motion with outstanding accuracy on the most complex trajectories. Featuring, precision engineered components and design that minimizes both wear and motor heating, XM performance maximizes your motion investment for the long-term. XM stages are an ultra-high-performance solution for applications such as laser machining, semiconductor wafer process, sensor test and calibration, ultra-precision assembly and other scanning applications requiring excellent dynamic response. 

An MIM of 1 nm is achievable using XPS-DRV02L Low-Noise Drive and controlled environment. Contact Newport for additional information.

• 行程范围

  100 mm

• 最大速度

  300 mm/s

• 最小位移增量

  0.001 µm

• Continuous Motor Force

  25 N

• Peak Motor Force

  100 N

• 中心负载

  100 N

• Accuracy, Typical

  ±0.3 µm

• Accuracy, Guaranteed

  ±0.75 µm

• 双向重复精度，典型值

  ±0.030 µm

• 双向重复精度，保证值

  ±0.040 µm

• 典型平面度（保证值）

  ±0.37 (±0.75) µm

• 典型直线度（保证值）

  ±0.37 (±0.75) µm

• 俯仰，典型值

  ±12 µrad

• Pitch, Guaranteed

  ±25 µrad

• 俯仰顺应性

  2.5 µrad/Nm

• 偏转，典型值

  ±10 µrad

• Yaw, Guaranteed

  ±25 µrad

• 偏摆顺应性

  3.5 µrad/Nm

• 翻转顺应性

  2.0 µrad/Nm

• Encoder Resolution

  1 Vpp 4 µm pitch

• 限位开关

  Optical, on encoder's fiducial track

• 原点

  Optical, centered

• 原点重复精度

  ±0.025 µm

• 电缆长度

  5 m

• 接头类型

  DB9 Male, DB9 Female and DB15 Male

• 螺纹类型

  M4 and M6

• 重量

  3.5 kg

• MTBF

  20,000 h (25% load, 30% duty cycle)

• RoHS

  Compliant

XMS100超性能线性级提供了世界领先的动态性能，能够一致，可靠的运动到1nm的行程范围100毫米。创新和紧凑;XM级提供了健壮的、可重复的运动，在最复杂的轨迹上具有杰出的精度。XM的特点是，精密的工程部件和设计，使磨损和电机加热最小化，XM的性能使您的运动长期投资最大化。XM stage是一种超高性能的解决方案，适用于激光加工、半导体晶圆加工、传感器测试和校准、超精密组装和其他需要卓越动态响应的扫描应用。使用XPS-DRV02L低噪声驱动和受控环境，可以实现1nm的MIM。如需更多信息，请与新港联系。