The XMS50 Ultra-Performance Linear Stage delivers world-leading dynamic performance capable of consistent, reliable motion to 1 nm with a travel range of 50 mm. Innovative and compact; XM stages provide robust, repeatable motion with outstanding accuracy on the most complex trajectories. Featuring, precision engineered components and design that minimizes both wear and motor heating, XM performance maximizes your motion investment for the long-term. XM stages are an ultra-high-performance solution for applications such as laser machining, semiconductor wafer process, sensor test and calibration, ultra-precision assembly and other scanning applications with high dynamic response. 

An MIM of 1 nm is achievable using XPS-DRV02L Low-Noise Drive and controlled environment. Contact Newport for additional information.



XMS50超性能线性级提供了世界领先的动态性能,能够一致、可靠地运动到1nm,行程范围为50mm。创新和紧凑;XM级提供了健壮的、可重复的运动,在最复杂的轨迹上具有杰出的精度。XM的特点是,精密的工程部件和设计,使磨损和电机加热最小化,XM的性能使您的运动长期投资最大化。XM台是一种超高性能的解决方案,适用于激光加工、半导体晶圆加工、传感器测试与校准、超精密装配等具有高动态响应的扫描应用。

使用XPS-DRV02L低噪声驱动和受控环境,可以实现1nm的MIM。如需更多信息,请与新港联系。