The UTS100PPV6 Vacuum Compatible Linear Stage incorporates many of the advantages of the popular UTM series. This stage incorporates a low-profile design with excellent stiffness and thermal stability, making it ideal for environments where temperature is not very well controlled. The high output torque of the stepper motor minimizes the risk of lost steps and provides optimum MIM. It also features a diamond-corrected lead screw, and a precision lapped nut which includes anti-backlash preloading and a sophisticated decoupling system.
Note that the cable supplied with the stage is not vacuum compatible.
Can be ordered with a vacuum compatible 25pin SubD connector.
行程范围
100 mm
最大速度
10 mm/s
最小位移增量
0.30 µm
中心负载
100 N
轴向负载 (-Cx, +Cx)
50 N
逆轴向负载 (-Cx)
-10 N
Accuracy, Typical
±1.7 µm
Accuracy, Guaranteed
±3.5 µm
单向重复精度,典型值
±0.30 µm
单向重复精度,保证值
±0.5 µm
双向重复精度,典型值
±2.3 µm
双向重复精度,保证值
±3.0 µm
俯仰,典型值
±25 µrad
Pitch, Guaranteed
±50 µrad
俯仰顺应性
15 µrad/Nm
偏转,典型值
±20 µrad
Yaw, Guaranteed
±35 µrad
偏摆顺应性
15 µrad/Nm
翻转顺应性
10 µrad/Nm
驱动螺距
2 mm
原点
Optical, centered
原点重复精度
±2.5 µm
电缆长度
3 m
接头类型
DB15 Male
真空兼容性
10-6 hPa
螺纹类型
M4 and M6
重量
3.3 kg
MTBF
20,000 h (25% load, 10% duty cycle)
RoHS
Compliant
UTS100PPV6真空兼容线性级结合了流行的UTM系列的许多优点。这一阶段结合了一个低剖面设计,具有良好的刚度和热稳定性,使其理想的环境温度不是很好控制。步进电机的高输出转矩可以最大限度地降低步长丢失的风险,并提供最佳的MIM。它还具有一个钻石校正的丝杠,和一个精密搭接螺母,其中包括反反弹预加载和一个复杂的解耦系统。注意,与工作台一起提供的电缆不是真空兼容的。可以订购与真空兼容的25pin SubD连接器。