The MFA-CCV6 Vacuum Compatible Miniature Linear Stage is designed for space-limited applications and compact multi-axis assemblies. It is a high resolution, single-axis 25 mm stage in a low-cost, motorized package. Typical applications for this stage are fiber optic alignment, laser diode research, bio-medical applications and inspection systems. The MFA-CC DC-motor features an integrated gear-box and a motor-mounted high resolution 2,048 cts/rev rotary encoder. The high-resolution position feedback and low-friction mechanical design ensures ultra-smooth motion with 100 nm sensitivity. The MFA-CC is the choice for applications that require small incremental motion, high dynamic speed range and good repeatability. The smooth motion of the MFA linear stages is further accentuated by Newport's proprietary double-row linear ball bearing design with bearing ways that are directly machined into the structural frame of the stage. Compared to alternative solutions that use commercial bearings, MFA linear stages offer a higher load capacity and stiffness with low pitch and yaw errors. Another benefit of Newport's integrated bearing ways is the availability of 4 widely spaced mounting holes for base mounting and XY-assemblies. This provides better stress distribution and allows for more rigid multi-axis combinations.
Due to the various feed-through configurations and preferences of customers, the connector supplied with the stage is not vacuum compatible. It can be ordered with a vacuum compatible 25pin SubD connector.
行程范围
25 mm
最大速度
1.25 mm/s
最小位移增量
0.10 µm
中心负载
25 N
轴向负载 (-Cx, +Cx)
5 N
逆轴向负载 (-Cx)
-5 N
Accuracy, Typical
±1.0 µm
Accuracy, Guaranteed
±3.0 µm
单向重复精度,典型值
±0.08 µm
单向重复精度,保证值
±0.15 µm
双向重复精度,典型值
±0.2 µm
双向重复精度,保证值
±1.0 µm
俯仰,典型值
±25 µrad
Pitch, Guaranteed
±100 µrad
俯仰顺应性
80 µrad/Nm
偏转,典型值
±30 µrad
Yaw, Guaranteed
±50 µrad
偏摆顺应性
80 µrad/Nm
翻转顺应性
60 µrad/Nm
驱动螺距
0.5 mm
减速轮
1:14
Encoder Resolution
0.0176994 µm
限位开关
Optical switches
原点
Optical, at lower limit
原点重复精度
±2.5 µm
电缆长度
1.5 m
接头类型
DB25 Male
真空兼容性
10-6 hPa
螺纹类型
M2 and M3
重量
0.73 kg
MTBF
10,000 h (25% load, 30% Duty cycle)
RoHS
Compliant
MFA-CCV6真空兼容微型线性级是为空间有限的应用程序和紧凑的多轴组件而设计的。这是一个高分辨率,单轴25毫米级在一个低成本,机动包装。该阶段的典型应用包括光纤对准、激光二极管研究、生物医学应用和检测系统。MFA-CC DC-motor具有集成变速箱和电机安装的高分辨率2048 cts/rev旋转编码器。高分辨率的位置反馈和低摩擦的机械设计确保了100纳米灵敏度的超光滑运动。MFA-CC是需要小增量运动、高动态速度范围和良好重复性的应用程序的首选。MFA线性级的平滑运动通过新港独有的双列线性滚珠轴承设计进一步得到强调,轴承方式直接加工成级的结构框架。与使用商业轴承的替代解决方案相比,MFA线性级提供了更高的负载能力和刚度,具有较低的俯仰和偏航误差。新港综合轴承方式的另一个好处是,有4个广泛间隔的安装孔,用于底座安装和xy组件。这提供了更好的应力分布,并允许更多的刚性多轴组合。
由于客户的各种馈线配置和喜好,与舞台配套的连接器不兼容真空。它可以订购与真空兼容的25针SubD连接器。