硅基单片集成 7bit 可调光延时器芯片

Single-chip Integrated 7 Bit Optical Delay Chip

〖简介Introduction〗

梓冠光电的单片集成多比特光延时芯片是基于厚膜 SOI 硅光子技术、将硅基光开关和硅波导延时路单片集成的自主研发产品。

〖特性Features〗

n 高速切换

High speed switching

n 高延时精度

High delay accuracy 

n 超小尺寸

Ultra-small size

n 超宽带工作

Ultra-broadband operation

n 全固态波导芯片可靠性强

All solid-state waveguide chip of high reliability

集成的硅基光开关使其延时态切换速度达到 1 μs 以下，硅波导延时使其延时精度提升 1 个量级，厚膜 SOI 硅光技术使其光损耗达到工程应用水平，单片集成的芯片解决了传统光延时器的体积大、可靠性差问题，是可全方面满足光控相控阵应用要求的新一代产品。

The single-chip integrated multi-bit optical delay chip of Ziguan Photonics is an independently developed product based on thick film SOI silicon photonics technology, which integrates silicon based optical switches and silicon waveguide delay circuits on a single chip. The integrated silicon based optical switch achieves the delay state switching speed less than 1 μs, the delay of silicon waveguide improves its delay accuracy by one order of magnitude, and the thick film SOI silicon optical technology enables the optical loss to reach the level of engineering application. The single chip integrated chip solves the problems of large volume and poor reliability of traditional optical delay devices, and is a new generation product that can fully meet the application requirements of optically contronlled phased array.

〖特性Features〗

n 高速切换

High speed switching

n 高延时精度

High delay accuracy 

n 超小尺寸

Ultra-small size

n 超宽带工作

Ultra-broadband operation

n 全固态波导芯片可靠性强

All solid-state waveguide chip of high reliability

〖应用Applications〗

n 光控相控阵雷达系统、电子对抗系统

Optically controlled phased array radar system、Electronic warfare system(EWS)

〖主要性能指标 Specifications〗

图 1 单个 2×2 光开关光信号输入输出端口示意

Figure 1   A single 2×2 optical switch optical signal input and output ports

2×2 光开关（图 1）的“交叉”、“直通”传输状态定义如下：

The "Cross" and "Bar" transmission states of the 2×2 optical switch (Figure 1) is defined as follows:

“交叉”状态（cross 态）：从输入 A 端输入，输出端 D 有光信号输出，输出端 C 没有光信号输出时，即为”交叉“态（A→D）；类似定义，从输入端 B 输入，输出端 C 光信号输出，输出端 D 没有光信号输出，也为”交叉“态（B→C）。

“直通”态（bar 态）：从输入端 A 处输入，输出端 C 有输出光信号，输出端 D 没有光信号输出时，即为”直通“态（A→C）；类似定义，从输入端 B 输入，输出端 D 有光信号输出，输出端 C 没有光信号输出，也为“直通”态（B→D）。

Cross state: When input is from input A, output D has an optical signal output, and output C has no optical signal output, it is called the "cross" state (A → D)；Similarly, when input is from input B, output C has an optical signal output, and output D has no optical signal output, it is also called the "cross" state (B → C).

The "Bar" state (bar state): When input is from input A, output C has an output optical signal, and output D has no optical signal output, it is called the "bar" state (A → C). Similarly, when input is from input B, output D has an optical signal output, and output C has no optical signal output, it is also called the "bar" state (B → D).

7bit 可调延时器芯片 PAD 尺寸为 150μm×150μm，PAD 中心间距为 200μm，各 PAD 定义如下表：

The PAD size of the 7-bit adjustable delay device chip is  150μm×150μm. and the center distance of the PAD is 200 μ m. The definition of each PAD is as follows: