Design Features



This is a high acceleration, compact-footprint linear actuator designed for HARP high-acceleration, reciprocating probe applications. The long-travel actuator provides exceptional velocity stability and precise positioning in a very small footprint. It can be made for either air or vacuum-rated applications.



ACT200HA
Positioning Travel 1100 mm (travel is reduced based on speed and acceleration requirements; travel for max speed specified is 1000 mm)
Accuracy LT Standard ±50.0 µm
HALAR(1) ±1 µm
Repeatability(1) ±1 µm
Dynamic Maximum Speed(2) 3 m/s
Maximum Acceleration(2) 4g
Other Maximum Force (Continuous) 100 N
Load Capacity(3) Horizontal 60 kg
Side 30 kg
Moving Mass
5 kg
Stage Mass
48 kg
Material Aluminum body/no finish
Vacuum Rating
10-6 Torr



  1. Certified with -PLOTS option.

  2. Speed and acceleration based on 1 kg load.

  3. Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.

  4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and work-point dependent. Consult factory for multi-axis or non-standard applications.